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150mm Probe Stations

Products

A modular 150 mm manual probe system designed for upgradability

The MPS150 is a very cost-effective and easy to use, yet highly-precise manual probe system for wafers and substrates up to 150 mm. It supports a wide variety of applications such as I-V/C-V, RF, mm-Wave and sub-THz measurements, device characterization, failure analysis (FA), submicron probing, MEMS, optoelectronic engineering tests and more. Its stable platen is designed to accommodate up to sixteen positioners, providing a function similar to a probe card for special wafer-level reliability (WLR) applications.

Features and Benefits

  • Flexibility – Multiple options available for easy reconfiguration and upgrades for a wide range of applications
  • Stability – Rigid microscope bridge and solid station frame with built-in vibration-isolation solution for superior vibration attenuation
  • Ease-of-use - Ergonomic and straightforward design for comfortable and easy and simple operation

Application-Focused Solutions

Cascade Microtech offers MPS150-based pre-configured packages, dedicated for specific applications. Cascade Microtech’s application-focused probing solutions come with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence.

 

Contact Sales

Contact us at 1-800-550-3279 (1-503-601-1000) or complete our sales inquiry form.

I-V/C-V DC parametric and low-noise measurements

The EPS150COAX, EPS150COAXPLUS and EPS150TRIAX are dedicated probing solutions that come with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The EPS150COAX and EPS150COAXPLUS incorporate best known methods for DC parametric test at pA levels. The EPS150TRIAX is a dedicated probing solution for low-noise I-V/C-V measurements at fA levels.

EPS150COAX Flyer
 EPS150COAXPLUS Flyer             
EPS150TRIAX Flyer

DC Paramtric Test Probe Station EPS150COAX
EPS150COAX Probe System

RF Precision RF measurement results and calibrations up to 67 GHz

The EPS150RF is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for RF probing up to 67 GHz, with the ability to probe pads as small as 25 μm x 35 μm and beyond.

EPS150RF Flyer
RF Test Probe Station EPS150RF
EPS150RF Probe System

MMW millimeter-Wave, sub-THz and load pull measurements above 67GHz and beyond.

The EPS150MMW is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for probing up to THz frequencies.

EPS150MMW Flyer
MMW Probe Station EPS150MMW
EPS150MMW Probe System

Faliure AnalysisInternal node probing down to submicron level

The EPS150FA is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for electrical failure verification, localization and debug with the ability to probe features smaller than 1 μm.

EPS150FA Flyer
FA Probe Station EPS150FA
EPS150FA Probe System

High-power device characterization Precision on-wafer high-voltage/current measurements

The EPS150TESLA is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for high-voltage probing of power MOSFET, IGBT, BJT and other power devices at breakdown voltages up to 3,000 V (triaxial) /10,000 V (coaxial), and high-current probing up to 100 A for lowest on-state resistance.

EPS150TESLA Flyer
EPS150TESLA Data Sheet
EPS150TESLA Facility Planning Guide
EPS150TESLA - Hight Power Probe Station
EPS150TESLA Probe System