Fully Automated Probe Systems
Our fully-automated probers are anything but ordinary solutions. Each system is innovative and modular. Our automated wafer probers are tailored to test your devices in ways that other probe system manufacturers cannot. The AP200 is compatible with all SUSS accessories and offers a high-throughput platform for challenging test requirements. The BlueRay™ Probe System is specifically designed to tackle tests where traditional DC measurements aren’t enough, for example when testing optoelectronic (LED), RF (SAW/BAW/FBAR) and MEMS (pressure sensors) devices. The patented Cluster Probe System is the ultimate in innovative production test – up to six, individually-configured prober modules clustered around a central wafer robot.AP200
The AP200 combines the versatility of an analytical probe station with the throughput of a loader module. Specially designed to carefully handle the most sensitive of substrates, the AP200 is ideally suited for probing MEMS, SAW filters and other devices that need a high level of customization.
Wafer size: ≤ 200mm
Main Applications: DCM, PT
AP200 BlueRay™ Probe System
The BlueRay™ probe system is now the only probe system in the world that can be upgraded from a semiautomatic to a fully-automated wafer prober in the field and in only a couple of hours. To meet growing production demands, a unique, wafer-handling robot can be docked onto the PA200A BlueRay. Once the docking process is complete, the robot then handles all wafers automatically.
High-Throughput Production Test System
Wafer size: ≤ 200mm
Main Applications: PT
CP200-X Series Cluster Probe System
The Cluster Probe System is a revolutionary new method for wafer-level functional test in a production environment. SUSS drew on its expertise in producing innovative cluster systems for lithography and bonding applications and applied it to wafer-level test, creating a solution available only from Cascade Microtech.
Cluster Production Test System
Wafer size: ≤ 200mm
Main Applications: DCM, PT
