C4S Resistivity 4-point Probe Head
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Fast, accurate and reliable resistivity testing
Your key to accurate characterization of on-wafer resistance properties, the C4S Resistivity 4-point probe head provides precise, repeatable measurements for faster, less-costly testing.
- 50,000 accurate, repeatable measurements per probe head
- Probe tip pressure is field adjustable to compensate for wear
- Anodized-aluminum body electrically shields all active internal components
- Built-in main compression spring through a semi-rigid spacer ensures equalized tip pressure even on uneven wafer surfaces
- Unique composition nosepieces ensure smooth tip travel; outlast jeweled bearings
- Available with full range of probe spacing, tip material and radii, and spring pressure choices
Specifications
- Side deflection: 1.25 μm (0.05 mils) maximum
- Vertical stroke: 2.54 mm (100 mils) maximum
- Spacing Accuracy: ±1%
- Displacement Accuracy: 0.1%
Part Number
C4S-XY/WZ (X= Spacing, Y= Pressure, W= Tip Radius, Z= Tip Material)
|
Material to be measured |
X = Spacing |
Y = Pressure (per tip) |
W = Tip Radius |
Z = Tip Material |
|
Silicon slices |
4 = 1.25 mm (0.04") |
7 = 70-180 gms |
0 = 50 μm/2 mils |
O = Tungsten carbide |
|
Gallium arsenide |
7 = 70-180 gms |
7 = 17.5 μm/0.7 mils |
O = Tungsten carbide |
|
|
Semiconductor sheet resistance |
4 = 40-70 gms |
0 = 50 μm/ 2 mils |
O = Tungsten carbide |
|
|
Thin metallic films |
4 = 40-70 gms |
1 = 250 μm/10 mils |
S = Osmium |

