Tesla solves the challenge of thin wafers, power dissipation and current/voltage requirements

The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. Cascade Microtech’s Tesla on-wafer power device characterization system meets the challenge, reducing time-to-market for new power devices. Tesla is the industry’s first power device measurement system that provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 100 A (pulsed)/10 A (DC).

Overcoming the challenges of wafer-level power device characterization
Challenge	High-Current Probe	High-Voltage Probe	Tesla Chuck	Tesla Station
Handling thin wafers
Rds(on) Measurements
High-current probe burnout
Low-leakage measurement at high voltage
Safety for device, operator and probing equipment