Precision high-power device characterization at the wafer level
The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. Cascade Microtech offers on-wafer power device characterization systems to reduce time-to-market for new power devices and to keep up with production.
For cost-effective manual high-power device probing up to 150 mm wafers, the EPS150TESLA ensures accurate measurements up to 10,000 V and 80 A DC.
The Tesla semi-automatic power device characterization systems for 200 mm and 300 mm wafers provide a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC).
The APS200TESLA, a fully-automatic 200 mm on-wafer probe system, is the industry’s first dedicated test system for high-power device production test up to 10.5 kV/400 A. Its high-power chuck with Taiko wafer handling capability, an anti-arcing solution and an auto-discharging system ensure high throughput and measurement accuracy, while providing a regulatory-certified safe testing environment.
Full-auto/Production Test 200 mm wafer
Semi-auto 150 / 200 / 300 mm wafer options
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The Tesla semi-automatic power device characterization system provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC)., while providing a low-noise, fully guarded and shielded test environment, as well an infrared laser light curtain and safety interlock system.
 Tesla Product Highlights
Tesla System Brochure
Tesla Data Sheet
 TESLA Product Video
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TESLA200
TESLA300
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Manual 150 mm wafer
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The EPS150TESLA is a dedicated probing solution that comes with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The system incorporates best-known methods for high-voltage probing of power MOSFET, IGBT, BJT and other power devices at breakdown voltages up to 3,000 V (triaxial) /10,000 V (coaxial), and high-current probing up to 100 A for lowest on-state resistance.
EPS150TESLA Flyer
EPS150TESLA Data Sheet
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EPS150TESLA
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Manual 200 mm wafer
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Contact Sales
Contact us at 1-800-550-3279 (1-503-601-1000) or complete our sales inquiry form.
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