Double-Sided Probe Systems
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Excellent Solution for Emission Microscopy
The patented Double-Sided Probe Systems (DSP) are the technology leaders for all applications requiring access from both the top and back side of the wafer. Working in close cooperation with the leading suppliers of emission microscopes, Cascade Microtech has developed systems that are invaluable for defect localization in design verification and failure analysis when the DUT has multiple layers of metallization, flip-chip or lead-on-chip packaging.
Features and Benefits
- Full access to both sides of the DUT
- Available for all emission microscopes from leading vendors
- Submicron resolution and stability
- Very flexible design
- Accessories available
Cascade Microtech has designed and manufactured both manual and semiautomatic DSP systems for all substrate sizes spanning from a single chip up to 300 mm wafers.