Cascade Microtech offers a variety of chucks depending on the substrate to be tested. Specialist chucks include:

• HF chuck: either metal, ceramic or a combination of both. All equipped with 2 sites for calibration substrates and/or cleansing pads
• Double Side Chuck: Patented double side design can be configured to hold a variety of different substrate designs and sizes. Mainly used within emission microscopy systems, it can also be used to hold special substrates including MEMS dies held in square metal carriers.

Solutions for holding gel packs are also available.