PM5: 150mm Manual Probe System
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Efficient and Compact
Features and Benefits
- For use with wafers and substrates up to 150mm
- Cost effective, small footprint
- Easy to install and set up
- Versatile system concept meets laboratory user requirements
- Full range of accessories can be used on the PM5
The PM5 Analytical Probe System is intended for cost-effective and precise analysis of wafers and substrates up to 150mm (6").
High application flexibility is guaranteed with the PM5, which is suitable for the whole spectrum of DC and HF measurements. An exceptional failure analysis tool, it can be used as a flexible probe card, allowing up to 20 ProbeHeads™ at one time. Optional probing accessories can be added onto the PM5 ensuring field upgrades at any time as well as an excellent cost of ownership.

