EP6 RF Probing Package
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Accurate RF Measurements Right Out of the Box
Features and Benefits
- Complete 150 mm RF wafer-probing package: probe station, microscope, positioners, wafer probes and cables and WinCal XE™ calibration software
- Stable performance, high mechanical accuracy and ergonomic operation
- Robust, long-life |Z| Probes® – probes last longer under extreme wear and tear
- Application support from the wafer-level RF measurement experts
The EP6 RF probing package is designed to give you a cost-effective solution for highly-accurate S-parameter measurements. The package includes the renowned, long-life |Z| Probes® and a CSR calibration substrate. This ensures high measurement accuracy and repeatability.
The entire package includes:
- EP6 probe station with ±10° fine-theta movement
- 150 mm HF wafer chuck with two cal sites
- Stable probe platen with 40 mm lift and 200 µm separation, can be upgraded with a 4.5″ probe card holder
- Stereo microscope (video option available) with cold-light source and fiber-optic ring light
- 2 positioners for high-precision probe positioning
- 2 |Z| Probes with a guaranteed lifetime of 1 million touchdowns
- 2 RF cables with low insertion loss
- 1 CSR calibration substrate for high calibration accuracy
- WinCal XE calibration software with LRRM, LRM+ and hybrid LRRM for multi-port
If you need a custom solution, the PM5 manual probe station can be tailored to your exact probing needs.
