EP6 DC Probing Package
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Accurate DC Measurements Right Out of the Box
Features and Benefits
- Complete 150 mm DC wafer-probing package: probe station, microscope, ProbeHeads™, probes and cables
- Stable performance, high mechanical accuracy and ergonomic operation
- Precision theta and z movement for accurate positioning
- Low-Signal option for measurements in fA range
- Application support from the wafer-level measurement experts
The EP6 DC probing package is designed to give you a cost-effective solution for highly-accurate DC measurements such as simple I-V and C-V measurements as well as on-wafer failure analysis. The package includes four precision PH110 ProbeHead manipulators, probes and cables. The low-signal option includes triaxial measurement capabilities and the ShieldEnclosure™ SE750 for sensitive measurements in the fA range. Additionally, a video option is available to further enhance wafer navigation.
The entire package includes:
- EP6 probe station with 360° theta movement
- Stable probe platen with 40 mm lift and 200 µm separation, can be upgraded with a 4.5″ probe card holder
- 150 mm wafer chuck
- Stereo microscope (video option available) with cold-light source and fiber-optic ring light
- 4 PH110 ProbeHeads™ for high-precision probe positioning and coaxial probe arms with 2 m 50 Ω cables
- Package of 25 tungsten probe tips with 7 µm diameter
- Low-Signal option adds ShieldEnclosure™ SE750 and triaxial probe arms and cables for EMI/RFI-shielded measurements in the fA range
If you need a custom solution, the PM5 manual probe station can be tailored to your exact probing needs.
