150mm Probe Stations
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Probe Systems Planning
Cascade Microtech offers several cost-effective manual probing solutions for 150mm DC and RF. With a modular design, our platforms offer a broad range of configuration possibilities to deliver precision measurement and analysis.
PM5: 150mm Manual Probe System
The PM5 Analytical Probe System is intended for cost-effective and precise analysis of wafers and substrates up to 150mm. High application flexibility is guaranteed with the PM5, which is suitable for the whole spectrum of DC and HF measurements.
Wafer size: ≤ 150 mm
Main Applications: DCM, FA [View more]
EP6 RF Probing Package
The EP6 RF probing package is designed to give you a cost-effective solution for highly-accurate S-parameter measurements. The package includes the renowned, long-life |Z| Probes®, and a CSR calibration substrate. This ensures high measurement accuracy and repeatability.
Wafer size: ≤ 150 mm
Main Applications: RF Test [View more]
EP6 DC Probing Package
The EP6 DC probing package is designed to give you a cost-effective solution for highly-accurate DC measurements such as simple I-V and C-V measurements as well as on-wafer failure analysis.
Wafer size: ≤ 150 mm
Main Applications: DC Test [View more]
