200mm Probe Stations

Cascade Microtech’s industry standard 200 mm wafer probing systems are in use at virtually all leading semiconductor manufacturing and design sites worldwide. They have been designed to allow access the full measurement range of today’s most advanced test instrumentation. Whatever the application - device characterization, modeling, process development, design de-bug or IC failure analysis, Cascade Microtech probing systems have the precision and versatility needed for the most advanced semiconductor processes and aggressively scaled devices.

Summit 11000/12000 Probe Stations

The Summit series measurement platforms, with PureLine™ and AttoGuard® technology, allow you to access the full range of your test instruments for 200mm and 150mm wafers. Whatever your application: RF/Microwave, device characterization, wafer level reliability, e-test, modeling, or yield enhancement, Summit series platforms lead the industry in on-wafer measurements.

PM8: The Benchmark in 200mm Manual Probing

The PM8 Analytical Prober is the benchmark in manual failure analysis and in-process testing. This modular system meets customers' needs for precision, reliability and cost of ownership.

Wafer size: ≤ 200 mm
Main Applications: DCM, FA

AP200

The AP200 combines the versatility of an analytical probe station with the throughput of a loader module. Specially designed to carefully handle the most sensitive of substrates, the AP200 is ideally suited for probing MEMS, SAW filters and other devices that need a high level of customization.

Wafer size: ≤ 200mm
Main Applications: DCM, PT

The BlueRay™ Probe System

Setting a new standard for high-speed accuracy, the BlueRay™ probe station is precisely the solution you need for wafer-level functional test of discrete devices.

High-Throughput Production Test System
Wafer size: ≤ 200mm
Main Applications: PT

AP200 BlueRay™ Probe System

The BlueRay™ probe system is now the only probe system in the world that can be upgraded from a semiautomatic to a fully-automated wafer prober in the field in a few hours. To meet growing production demands, a unique, wafer-handling robot can be docked onto the PA200A BlueRay. Once the docking process is complete, the robot then handles all wafers automatically.

High-Throughput Production Test System
Wafer size: ≤ 200mm
Main Applications: PT

PA200 Semiautomatic Probe System

The PA200 semiautomatic probe station relies on precision engineering to provide a stable environment for the most exacting applications.

Wafer size: ≤ 200mm
Main Applications: DCM, FA

R48/R61 Failure Analysis & General Purpose Systems

Flexible and affordable the REL-6100 and REL-4800 Series Parametric Probe Stations combine precision sub-micron probing capability needed for IC failure analysis and design de-bug. Sub-micron resolution, precise motion control, and 8-inch travel.