RF Parameter Extraction for Semiconductor Device Modeling

Cascade Microtech’s RF/Microwave test systems include high performance probe stations, high frequency probes up to 220GHz, Impedance Standard Substrates, and calibration software with RF measurement support tools.

Problems	Solutions
Support for multiple device pads sizes and pitches	Broad assortment of RF probes
On-wafer tolerant Network analyzer calibrations	Calibration software with advanced calibration algorithms
Defining precision reference structures for calibration	Variety of Impedance Standard Substrates
Noise free data	MicroChamber DUT shielding
Reliable and precise 4-port setup and calibrations	Advanced 4-port hybrid calibrations, standards, dual probes
Ft measurement to 220 GHz	Assortment of Waveguide probes for up to 220 GHz