Tesla: On-Wafer Power Device Characterization System
Tesla solves the challenge of thin wafers, power dissipation and current/voltage requirements
The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. Cascade Microtech’s Tesla on-wafer power device characterization system meets the challenge, reducing time-to-market for new power devices. Tesla is the industry’s first power device measurement system that provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 60 A (pulsed)/10 A (DC).
| Tesla: On-wafer power device characterization system | |
|---|---|
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| Spec Sheet | Dry Demo |
| Overcoming the challenges of wafer-level power device characterization | ||||
|---|---|---|---|---|
| Challenge | High Current Probe | High Voltage Probe | Vacuchannel Chuck | T200 Station |
| Handling thin wafers |  | |||
| Rds(on) Measurements | | | | |
| High-current probe burnout | | |||
| Low-leakage measurement at high voltage | | | | |
| Safety for device, operator and probing equipment | | | | |
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