Emission Microscopy
Observe, Probe and Map device emission at micron level for failure analysis
The advantage of Cascade Microtech’s system is full system integration with all commercially available emission microscopy products, enabling IR spectrum, thermal analysis, thinned wafer support, backside probing, interfacing to CAD navigation software.
| Requirements | Solutions | Advantages |
|---|
| Thermal analysis | Choice of high power microscopes | Flexible emission analysis |
| Analysis of thinned wafers | Liquid crystal analysis capability | Vibration-free measurements |
| IR spectrum support | Thinned wafer support | Measurement confidence from proven systems |
| CAD navigation capability | Mechanically stable probe systems | |
| Wafer backside viewing | CAD navigation interfaces | |
| | Polarized optics | |
| | Vibration isolation | |
| | IR CCTV | |
