RF Probe Setup Guide: Video 3: Placing the ISS
In on-wafer measurements, a Contact Substrate is used to evaluate the planarity of the probes. The Contact Substrate is an alumina substrate with a gold top layer.
The Impedance Standard Substrate, commonly called the ISS, consists of all the standards required for calibration.
Place the Contact Substrate and the ISS onto the auxiliary stages. These are located in the upper-left and right-hand corners of the chuck. Align them so that they are square with the edges of the chuck. Then, turn on the vacuum.
Move the stage so that the probes are placed over the Contact Substrate. Be careful to ensure that the probes are raised high enough so that the Contact Substrate moves safely under the probes. Failure to do this could result in the Contact Substrate hitting the side of the probe tips and causing them to be permanently damaged. Align the two probes so that they are opposite each other.
