High Voltage Parametric (HVP) Probe
Accurate and precise measurement of device parameters up to 3000V
When power device engineers drive voltages to higher and higher levels, the capability to characterize these devices on wafer becomes increasingly difficult. As voltage increases, so does the potential for dielectric breakdown between the force, guard and shield layers, making low noise measurements difficult to obtain. Cascade Microtech's High Voltage Parametric Probe provides the capability to make coaxial measurements up to 3000V and triaxial measurements up to 1100V while preserving a low-noise measurement path. The HVP probe is engineered with proprietary insulation materials that prevent against dielectric breakdown to enable low leakage measurements as low as 100fA at high voltage (1100V).
Features
- Coaxial measurements up to 3000V and triaxial measurements up to 1100V
- High-quality construction with low-noise electrical performance
- Replaceable probe tips in a variety of tip sizes
- Temperature range of -55 to 200ºC
Advantages
- Triaxial measurement ensures a much better understanding of device leakage in the off state
- Highly reliable, stable and repeatable measurements
- Integrally designed as part of Cascade's complete measurement solution
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| High Current Parametric (HCP) Probe |
| Tesla: On-Wafer Power Device Characterization System |
