Backside Emission Microscopy Kit for R48/R61
The backside emission microscopy kit extends your stations’ failure analysis capabilities by allowing one station to be configured for both standard front-side probing as well as backside emission microscopy. Changing from standard front-side to backside probing is done quickly and easily, minimizing downtime and maximizing productivity.
Benefits
- Fast changeover allows system to be used for standard front-side probing and emission microscopy
- Ergonomic interface allows for easy setup and alignment of wafer
- Backside option fits inside envelope of existing probe station: ensures compatibility with existing dark boxes
- Inexpensive upgrade path for emission microscopy
Features
- Backside probing kit attaches to any existing thermal or non-thermal R48 or R61 probing station, without modification (option not available for guarded, GT and Microchambered systems)
- “Floating chuck” allows for quick setup and wafer loading. Custom chuck designs for 6 in. positioner probing, 8 in. positioner probing, and 8 in. probe card probing
- Micrometer controlled X and Y axis movements of floating chuck, provides 1 in. of fine X and Y control.
- Upward-looking CCD camera mounted on stage for probe-to-pad alignment
- Probe positioners can mount on top and bottom of standard platen (magnetic base required for bottom mounting)
- Design is compatible with a variety of probe card styles for backside probing
- Configurations available for the most popular emission microscopy equipment (Alpha Innotech, shown in photo; Hypervision and Hamamatsu)
Works with MultiProbe AFP Accessories
