Automated DC Positioners
The MS1-44 Series Programmable Micropositioners are designed for semiconductor wafer-probing applications on R48 & R61 stations where more accuracy and repeatability are required.
Advantages
- One-tenth micron step size offers the resolution required for today’s precision probing
- Custom-made miniature stepper motors and drive systems minimize unit size
- Stepper motors have “hands-on” override for manual operation
- Orthogonal movement permits consistent motion in relation to the streets and rows of the DUT
- Provides 3 axes of linear motion with either 25 mm or 50 mm (1 in. or 2 in.) of travel
- True linear motion for ultra precise probe-tip placement
- Compatible with active, coaxial, or triaxial probes
- Small size allows up to 6 micropositioners to be fitted to an 8-inch (200 mm) station
- Positioners on stations can operate with a host computer or with an inexpensive ERJ-02 joystick
- Right or left-hand configurations for convenience and ergonomics (photo shows an MS1-44/L with MMP-51 straight probe mount, top and MS1-44/R with MMP-01)
