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Elite 300 探针台平台

300mm

相关文件

300mm 晶圆探测的下一步

Elite 300 在 300mm 探测中设立了新标准。Elite 300 在 45nm 及以下工艺节点上与 ITRS 发展蓝图保持同步，它克服了由于器件复杂度的增加、焊盘尺寸的缩小以及电压的降低所带来的测量难题。Elite 300 在整个温度范围内提供了前所未有的步进准确度和晶圆平面度。另外，它还提供了当今世界上噪声最低的“安静”环境，并确保了低泄漏、低电容测量。

Problems Solved: Accurate Measurements in Complex Environments
ChallengeAdvanced StageThermal SystemPureline/ MicroChamberRigid ArchitectureAutomation
Small-Pad ProbingLayout - Blue DotLayout - Blue Dot Layout - Blue Dot Layout - Blue Dot
Thermal Measurements Layout - Blue DotLayout - Blue Dot Layout - Blue Dot
Low-Noise MeasurementsLayout - Blue DotLayout - Blue DotLayout - Blue Dot  
Multi-Site Testing Layout - Blue Dot Layout - Blue DotLayout - Blue Dot
Internal-Node Probing   Layout - Blue DotLayout - Blue Dot

Which Station is Right for My Application?
ApplicationElite 300/APElite 300/MElite 300/S
ParametricGm,VthLayout - Blue DotLayout - Lt Blue Dot 
Ig, Id offLayout - Blue DotLayout - Lt Blue Dot 
Cox, C-VLayout - Blue DotLayout - Lt Blue Dot 
1/fLayout - Blue Dot  
RFGain, Power Layout - Lt Blue DotLayout - Blue Dot
NF, NPLayout - Blue DotLayout - Lt Blue Dot 
mmWLayout - Blue DotLayout - Lt Blue Dot 
multi-port Layout - Lt Blue DotLayout - Blue Dot
WLREMLayout - Lt Blue DotLayout - Blue Dot 
TDDBLayout - Lt Blue DotLayout - Blue Dot 
NBTILayout - Lt Blue DotLayout - Blue Dot 
HCILayout - Lt Blue DotLayout - Blue Dot 
FA/DDInternal node  Layout - Blue DotLayout - Lt Blue Dot
EM Layout - Blue DotLayout - Lt Blue Dot
Laser Layout - Blue DotLayout - Lt Blue Dot
Sub-micron Layout - Blue DotLayout - Lt Blue Dot

Layout - Blue Dot = Recommended Layout - Lt Blue Dot = Compatible